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So the MAF sensor currently installed is a new Toyota OEM sensor, not aftermarket?
If so, have you checked the wiring connector for corrosion or damaged wiring?
If yes to both of those questions, then I would use your OBD2 device and look at the intake air temp reading and mass air flow reading, since Both those are coming from the same sensor, and watch them in “Live” mode as you drive and have the issue. See what the ECM thinks it is seeing.
 

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Ok.
You mentioned the CEL flashes when the OEM MAF sensor is installed, along with hesitation. Have you checked both stored and pending codes? You should have something in there for the flashing cel.
 
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